TUNGSTEN HEXAFLUORIDE
Tungsten hexafluoride
CAS: 7783-82-6
Molecular Formula: F6W
TUNGSTEN HEXAFLUORIDE - Names and Identifiers
| Name | Tungsten hexafluoride |
| Synonyms | WF6 UN2196 Tungstenfluoride Tungsten fluoride Hexafluorotungsten Tungsten hexafluoride TUNGSTEN(VI) FLUORIDE TUNGSTEN HEXAFLUORIDE Tungsten fluoride (WF6) tungsten(6+) hexafluoride (oc-6-11)-tungstenfluoride(wf6 Tungsten fluoride (WF6), (OC-6-11)- Tungsten hexafluoride [UN2196] [Poison gas] |
| CAS | 7783-82-6 |
| EINECS | 232-029-1 |
| InChI | InChI=1/6FH.W/h6*1H;/q;;;;;;+6/p-6/rF6W/c1-7(2,3,4,5)6 |
TUNGSTEN HEXAFLUORIDE - Physico-chemical Properties
| Molecular Formula | F6W |
| Molar Mass | 297.83 |
| Density | d15liq 3.441 |
| Melting Point | 2.3°C(lit.) |
| Boling Point | 17.5°C(lit.) |
| Water Solubility | decomposes |
| Vapor Presure | 10hPa at 20℃ |
| Appearance | colorless gas |
| Merck | 13,9885 |
| Physical and Chemical Properties | Chemical formula WF6. Molecular weight 297.84. Colorless gas or light yellow liquid. Strong irritation. Toxic, its toxicity and fluorine similar. White solid at very low temperature. Soluble in organic solvents and produce a special color. Decomposition in water. In the air by the moisture decomposition and strong smoke, yellow tungstic acid or tungsten trioxide. The chemical properties are active. It can react with almost all metals (except gold and platinum). It is also corrosive to nickel, monel and stainless steel, but Ni and stainless steel can resist its corrosion. In the dry state, the corrosion of the glass is weak, and the reaction can be rapid in the moisture. It reacts strongly with gaseous ammonia. Can be absorbed by ammonia or alkali. With alkali metal fluoride can form double salt. Soluble in benzene and other organic solvents. [density] 3.44 × 103kg/m3(15 ℃, liquid) [melting point] 2.5 ℃(5.6 × 104 Pa) [Boiling point] 17.5 ℃ [critical temperature] 171 ℃ [critical pressure] 445.8kPa [preparation method] direct reaction between metal tungsten powder and element fluorine synthesis. [main use] (1) a strong fluoride agent, used for vapor deposition of tungsten film. (2) used in the microelectronics industry for chemical vapor deposition of tungsten silicide or tungsten to produce low resistance, high melting point interconnect lines. FIG. 1 shows the molecular structure of tungsten hexafluoride. |
TUNGSTEN HEXAFLUORIDE - Risk and Safety
| Risk Codes | R23/24/25 - Toxic by inhalation, in contact with skin and if swallowed. R34 - Causes burns |
| Safety Description | S26 - In case of contact with eyes, rinse immediately with plenty of water and seek medical advice. S36/37/39 - Wear suitable protective clothing, gloves and eye/face protection. S45 - In case of accident or if you feel unwell, seek medical advice immediately (show the label whenever possible.) |
| UN IDs | UN 2196 2.3 |
| WGK Germany | 3 |
| RTECS | YO7720000 |
| Hazard Note | Toxic/Corrosive |
| Hazard Class | 2.3 |
TUNGSTEN HEXAFLUORIDE - Reference Information
| NIST chemical information | information provided by: webbook.nist.gov (external link) |
| EPA chemical substance information | information provided by: ofmpeb.epa.gov (external link) |
| Main application | tungsten hexafluoride (WF6) is the only stable fluoride of tungsten, it can show flexible physical and chemical properties according to the changes of the external environment, and is widely used in various fields of industrial production. Tungsten hexafluoride is mainly used as a wiring material for integrated circuits in the electronics industry, which can form a metal tungsten conductor film after chemical vapor deposition process, tungsten conductor films are commonly used in integrated electronics as highly conductive interconnect metals, via holes and vertical contact holes between metal layers, and isolation layers between aluminum and silicon, therefore, it is widely used in the field of semiconductor integration. In addition, tungsten hexafluoride can also be applied to the production of solar energy absorbers, X-ray emitting electrodes, conductive paste and other electronic component raw materials. |
| hazard characteristics | in case of humidity, air or water, it will decompose and emit highly toxic and corrosive hydrogen fluoride smoke. The skin, eyes, mucous membranes can cause very serious burns. High concentration exposure can cause Nausea, Vomit, Abdominal Pain, convulsions, kidney damage. This information was edited by chemical book Xiaonan (2015-09-05). |
| instructions for storage and transportation | in special steel bottles, stored in a cool and ventilated warehouse. Avoid direct sunlight. Stay away from heat and fire sources. To prevent moisture. With metal, glass products Isolation storage and transportation. The "toxic gas" sign must be attached. Transportation by air and rail is prohibited. When other combustible materials around fire, dry powder and carbon dioxide can be used to extinguishing the fire. Water can be used to cool the cylinder and close the valve quickly. |
| first aid measures | eye irritation can lead to blindness. It is difficult to heal the skin and mucous membrane after corrosion, must be washed with water, and then coated with magnesium oxide glycerin ointment or dilute ammonia, and medical treatment. |
| category | compressed and liquefied gases |
| flammability hazard characteristics | water decomposition of toxic hydrogen fluoride gas and tungstic acid |
| storage and transportation characteristics | warehouse ventilation and low temperature drying |
| extinguishing agent | Water |
| Occupational Standard | TLV-TWA 5 mg (tungsten)/m3; Tel 10 mg (tungsten)/M3 |
| toxic substance data | information provided by: pubchem.ncbi.nlm.nih.gov (external link) |
Last Update：2024-04-10 22:29:15
